Engineered for perfection in semiconductor lithography, wafer inspection, and advanced display technologies, our Double Side Super Smooth Flat Mirror Substrate delivers sub-Ångström surface roughness and unparalleled flatness (≤0.1μm). Whether you’re tackling nanoscale patterning or high-power laser systems, this substrate ensures defect-free performance with unmatched consistency. Trusted by leading semiconductor OEMs, it’s the backbone of precision where even a single imperfection can cost millions. [Request a Free Sample or Quote]
| Specification | Value |
|---|---|
| Dimension | D=φ10-φ100mm (tolerance ±0.1), H=3-30mm (tolerance ±0.5) |
| Surface Accuracy | λ/2-λ/10@632.8nm |
| Parallel Error | <15" |
| Roughness | Double-side Ra0.12nm (Zygo profilometer), test area 173*173um full frequency measurement |
| Materials | ULE, fused silica, Zerodur, sapphire, K9, single crystal silicon |
Note: Custom specifications are available upon request to meet your unique requirements.

Semiconductor Manufacturing
Eliminate overlay errors in ASML or Nikon scanners with Double Side Super Smooth Flat Mirror Substrate that maintain λ/20 flatness. Perfect for 3nm node processes.
Laser & Optical Systems
Minimize light scattering in high-power lasers or aerospace optics, ensuring beam integrity under stress.
Display Technology
Boost OLED/MicroLED yield rates with large-format substrates (up to 1m²) that resist warping during deposition.
1. 25+ Years of Expertise: Collaborations with top-tier semiconductor and display manufacturers.
2. R&D-Driven Solutions: Prototype in 15 days with our dedicated engineering team.
3. Sustainable Practices: Eco-friendly production and recyclable packaging options.
Case Study 1: Reduced lithography overlay errors by 38% for a leading 3nm node fab.
Case Study 2: Enabled 99.98% defect-free OLED panels for a global display leader.

1. How do you ensure dual-side flatness consistency?
Our proprietary polishing tech and inline metrology guarantee <1µm/m² tolerance.
2. What materials handle high-temperature semiconductor processes?
Fused silica and ULE® glass offer near-zero thermal expansion.
3. Can I get non-standard sizes for R&D projects?
Yes! We specialize in custom dimensions with a 15-day prototype turnaround.
4. How are Double Side Super Smooth Flat Mirror Substrate protected during shipping?
Cleanroom-packed in ISO Class 3 environments with shock-resistant casing.
5. What’s the lead time for 500+ units?
Typically 30 days, with priority scheduling for urgent needs.
Ready to elevate your optical systems with our Double Side Super Smooth Flat Mirror Substrate? Reach out to our team today for quotes, technical discussions, or custom inquiries. Email us at xachaona@163.com or visit our website for more information. Let's work together to bring precision and clarity to your projects!
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