Ultra-Smooth Fused Silica Substrates for Precision Optics
When your projects demand near-perfect optical clarity and thermal resilience, Fused Silica Super Smooth Mirror Substrate delivers unmatched performance. With surface roughness below 0.5 nm RMS and λ/10 flatness at 633 nm, these substrates minimize light scattering even in extreme environments. Designed for aerospace, semiconductor, and laser applications, they combine ultra-smooth finishes with a high laser damage threshold (40 J/cm² @ 1064nm) to meet rigorous industry standards.
Parameters
| Parameter |
Specification |
| Dimension |
D=φ12.7-φ100mm, H=4-8mm (customizable) |
| Kickoff size |
1/2D < Kickoff size < D (customizable) |
| Curvature radius |
SR=500-8000 (customizable), accuracy ±0.05% |
| Surface accuracy |
λ/2-λ/10@632.8nm |
| Spherical accuracy |
30"-3′ |
| Roughness |
Ra0.12nm (Zygo profiler, 173*173μm area) |
| Materials |
ULE, fused silica, zerodur, sapphire, K9, single crystal silicon |
Note: Specifications can be customized to meet your specific requirements.

Where Precision Matters Most
- High-Power Laser Optics: Our high-power laser optics are designed to revolutionize laser applications. By utilizing Fused Silica Super Smooth Mirror Substrate capable of withstanding multi-kilowatt beams, they significantly minimize energy loss. Even under intense power, these optics maintain sub-nanometer surface integrity, ensuring precise beam control and enabling high - efficiency operations in industrial cutting, welding, and scientific research.
- EUV Lithography Components: In the rapidly evolving field of semiconductor manufacturing, our EUV lithography components are essential for next - gen production. With ultra - flat surfaces achieving λ/20 precision, they enable defect - free patterning. This level of accuracy is crucial for creating smaller, more powerful chips, driving innovation in the semiconductor industry and advancing technology to new heights.
- Astronomical Telescope Mirrors: For capturing the wonders of the universe, our astronomical telescope mirrors are engineered to perfection. Built with space - grade optics that exhibit near - zero thermal expansion across temperature cycles, they ensure crisp and clear imaging. Whether observing distant galaxies or studying celestial bodies, these mirrors provide reliable and high - quality data for astronomical research.
- Microscopy & Beam Splitters: Our microscopy and beam splitters are crafted to enhance the capabilities of optical systems. The anti - reflective coated substrates, optimized for the UV - VIS - IR spectra, reduce light reflection and improve light transmission. This results in enhanced resolution, allowing researchers and scientists to observe specimens with greater detail and accuracy in various microscopy applications.
Built for Reliability
- Certifications: ISO 9001, MIL-STD-883, RoHS/REACH
- Testing: Zygo interferometry reports & 100% batch inspection
- Traceability: Full material lot tracking
Customize Your Solution
1. Submit Requirements: Share specs/drawings via email
2. Design Review: Get engineering feedback within 72 hours
3. Prototype: Receive test units in 14 days
4. Production: Scale with batch-certified quality

Why We’re the Preferred Choice
“Consistent 0.32nm RMS surfaces solved our EUV collector mirror challenges.”– Semiconductor Industry Leader
Global Support, Local Speed
- Fast Shipping: DDP delivery from US/EU/Asia hubs
- Expert Guidance: Dedicated project engineers
- 24/7 Assistance: Online portal for urgent requests

FAQs
1. What makes Fused Silica Super Smooth Mirror Substrate ideal for lasers?
Their <0.5nm roughness reduces scatter, while high LIDT (40 J/cm²) prevents beam damage.
2. Can you create substrates larger than 500mm?
Yes – contact us for custom large-format solutions up to 800mm.
3. How do thermal properties compare to Zerodur?
Our fused silica offers better UV transmission and lower CTE (0.55 vs 0.85 x10⁻⁶/K).
4. What coatings do you recommend for UV lithography?
Ion-beam sputtered dielectric coatings with <0.1% absorption at 13.5nm.
Contact Us
Ready to elevate your optical systems with our Fused Silica Super Smooth Mirror Substrate? Our team is here to assist you with any questions or custom requirements. Reach out to us at xachaona@163.com, and let's discuss how we can support your next project.