When your projects demand near-perfect optical clarity and thermal resilience, Fused Silica Super Smooth Mirror Substrate delivers unmatched performance. With surface roughness below 0.5 nm RMS and λ/10 flatness at 633 nm, these substrates minimize light scattering even in extreme environments. Designed for aerospace, semiconductor, and laser applications, they combine ultra-smooth finishes with a high laser damage threshold (40 J/cm² @ 1064nm) to meet rigorous industry standards.
| Parameter | Specification |
|---|---|
| Dimension | D=φ12.7-φ100mm(±0.01), H=4-8mm (customizable)(±0.05) |
| Kickoff size | 1/2D < Kickoff size < D (customizable) |
| Curvature radius | SR=500-8000 (customizable), accuracy ±0.05% |
| Surface accuracy | λ/2-λ/10@632.8nm |
| Spherical accuracy | 30"-3′ |
| Roughness | Ra0.12nm (Zygo profiler, 173*173μm area) |
| Materials | ULE, fused silica, zerodur, sapphire, K9, single crystal silicon |
| Application | High power laser,high precision optical inspection,semiconductor manufacturing,semiconductor inspection |
| Specific indicators are not the above scope,and can be customized according to user needs. | |
Note: Specifications can be customized to meet your specific requirements.

1. Submit Requirements: Share specs/drawings via email
2. Design Review: Get engineering feedback within 72 hours
3. Prototype: Receive test units in 14 days
4. Production: Scale with batch-certified quality

“Consistent 0.32nm RMS surfaces solved our EUV collector mirror challenges.”– Semiconductor Industry Leader

1. What makes Fused Silica Super Smooth Mirror Substrate ideal for lasers?
Their <0.5nm roughness reduces scatter, while high LIDT (40 J/cm²) prevents beam damage.
2. Can you create substrates larger than 500mm?
Yes – contact us for custom large-format solutions up to 800mm.
3. How do thermal properties compare to Zerodur?
Our fused silica offers better UV transmission and lower CTE (0.55 vs 0.85 x10⁻⁶/K).
4. What coatings do you recommend for UV lithography?
Ion-beam sputtered dielectric coatings with <0.1% absorption at 13.5nm.
Ready to elevate your optical systems with our Fused Silica Super Smooth Mirror Substrate? Our team is here to assist you with any questions or custom requirements. Reach out to us at xachaona@163.com, and let's discuss how we can support your next project.
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