Single Side Super Smooth Flat Mirror Substrate

Single Side Super Smooth Flat Mirror Substrate for Lithography, Wafer Inspection & Optical Sensors

When your optical systems demand perfection, our Single Side Super Smooth Flat Mirror Substrate delivers. Engineered for semiconductor lithography, wafer inspection tools, and high-sensitivity sensors, these substrates achieve <0.5nm surface roughness and λ/10 flatness—ensuring distortion-free performance in even the most demanding environments. Made from ultra-stable materials like fused silica or Zerodur®, they’re trusted by Fortune 500 manufacturers to eliminate surface defects and thermal drift.

Why Choose Our Mirror Substrates?

• Nanometer Precision: Achieve consistent <0.5nm RMS roughness using proprietary polishing, ensuring ultra-smooth surfaces that minimize light scatter. This precision is vital for high-end optics in semiconductor lithography and laser systems, where even tiny irregularities could disrupt critical light paths or reduce imaging clarity.
• Thermal Stability: Near-zero expansion materials prevent distortion under temperature swings (-60°C to +300°C), maintaining dimensional integrity in extreme environments. Ideal for aerospace sensors, industrial furnaces, and automotive optics, this stability ensures reliable performance whether exposed to freezing cold or intense heat.
• Custom Fit: Tailor dimensions (100mm–450mm), coatings, or edge treatments for your application, from compact medical scopes to large industrial mirrors. This customization allows seamless integration into unique systems, optimizing performance while reducing assembly time and ensuring a perfect fit for specific operational needs.
• Guaranteed Compliance: ISO 9001/14001 and SEMI standards met with full traceability, ensuring quality and environmental responsibility. These certifications simplify integration into global supply chains, from semiconductor fabs to aerospace projects, providing confidence in regulatory adherence and consistent product reliability.

Parameters

Note: Specifications can be customized to meet your specific needs.

Key Applications

From EUV lithography mirrors to hyperspectral sensors, our substrates enable:

• ✅ Semiconductor Manufacturing: Minimize overlay errors in ASML-style lithography tools with ultra-precise optics, ensuring alignment accuracy down to nanoscale. This precision is vital for producing advanced chips, where even tiny misalignments can ruin circuit patterns and reduce yields in high-volume production.​
• ✅ Wafer Inspection: Detect sub-10nm defects with λ/20 flatness optics, enabling detailed scrutiny of wafer surfaces. These high-precision components ensure no flaws go unnoticed, critical for maintaining semiconductor quality standards and preventing faulty chips from entering the supply chain.​
• ✅ Laser Systems: Maintain beam coherence in high-power industrial lasers through stable optical components that resist thermal distortion. This coherence ensures consistent energy distribution, essential for precise cutting, welding, and material processing in manufacturing environments.​
• ✅ Space Optics: Withstand orbital thermal cycles while preserving alignment, thanks to materials with near-zero thermal expansion. This reliability ensures telescopes and sensors capture clear data, even as temperatures swing drastically in the harsh vacuum of space, supporting ongoing space exploration and research.

Built for Critical Environments

Material Options

• ULE®/Zerodur®: Near-zero thermal expansion for metrology labs.
• Fused Silica: Ideal for UV laser applications with 99.99% purity.
• Sapphire: Extreme scratch resistance for harsh industrial settings.

Certifications

• 100% surface-mapped via Zygo interferometry.
• MIL-STD-810G validated for shock/vibration resistance.
• RoHS/REACH compliant for global shipments.

Customization Without Compromise

Need a substrate that fits your specs? We offer:

1. Diameter/Thickness Adjustments: In 5mm increments.

2. Edge Treatments: Precision chamfering (0.1mm–0.5mm).

3. Coatings: AR/HR layers optimized for 248nm–1550nm wavelengths.

4. Serialization: Laser-etched IDs for traceability.

Trusted by Industry Leaders

“Their Single Side Super Smooth Flat Mirror Substrate reduced our lithography rework rate by 22%.”– Top 5 Semiconductor OEM

“Consistent λ/10 flatness across 500+ units for our wafer inspection systems.”​​​​​​​– Global Optics Supplier

Flexible Ordering Options

Small Batches

• Prototyping support with 2-week lead times.
• Vacuum-sealed packaging to prevent contamination.

High-Volume Discounts

• 50+ units: Priority production + 8-week delivery.
• 200+ units: Dedicated quality team + bulk pricing.

FAQ

Q: How do you ensure <0.5nm surface roughness?

A: We use Zygo profilometers for 173x173μm full-frequency mapping on every Single Side Super Smooth Flat Mirror Substrate ​​​​​​​.

Q: Can I get ESD-resistant coatings?

A: Yes—custom coatings for semiconductor cleanrooms are available.

Q: What’s the lead time for 300mm ULE® substrates?

A: 6 weeks standard; expedited slots open for urgent needs.

Contact Us

Ready to elevate your optical systems with our Single Side Super Smooth Flat Mirror Substrate? Contact our team of experts today to discuss your requirements and receive a customized quote.

Email: xachaona@163.com​​​​​​​